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Microwave industrial applications-Microwave Plasma Technology

Author: langfeng Time: 2016-06-02

Microwave industrial applications - Microwave Plasma Technology
 
Semiconductor production process technology have been used in microwave plasma, etching, sputtering, vapor deposition, silicon wafers; can be used metals, alloys, non-metal surface treatment; plasma spectroscopy for the elements detectable dozen .
 
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